ACM Research Launches Ultra Lith KrF Track System for Semiconductor Manufacturing

What's Happening?

ACM Research, Inc., a supplier of wafer and panel processing solutions, has announced the launch of its Ultra Lith KrF track system. This new system is designed to support front-end semiconductor manufacturing, offering high-throughput performance, advanced thermal control, and real-time process monitoring. The system was shipped to a leading Chinese logic wafer fab customer in September 2025. The Ultra Lith KrF track system builds on ACM's previous ArF track platform, which demonstrated sub-angstrom-level coating uniformity and advanced thermal control. The KrF system features a flexible process module configuration, including 12 spin coaters and 12 developers, supported by 54 hot plates capable of various temperature processing. It achieves throughput greater than 300 wafers per hour and incorporates proprietary technology to minimize cross-contamination risk.

Why It's Important?

The launch of ACM's Ultra Lith KrF track system is significant for the semiconductor industry, particularly in mature-node devices, which represent a growing portion of global semiconductor output. By offering both ArF and KrF track systems, ACM enhances manufacturing flexibility and integration across diverse applications. This development could lead to increased productivity and product yield for semiconductor manufacturers, addressing a broader range of lithography challenges. The system's advanced features, such as real-time process variation detection, enhance process stability and production efficiency, potentially benefiting the semiconductor industry's competitiveness and innovation.

What's Next?

ACM Research plans to continue expanding its presence in front-end process equipment, addressing more lithography challenges. The company may seek further integration of its systems in semiconductor fabs globally, potentially leading to collaborations or partnerships with other industry players. As the demand for mature-node devices grows, ACM's technology could play a crucial role in meeting industry needs, driving advancements in semiconductor manufacturing processes.